发明名称 Coated doped oxides
摘要 Oxide particles with a doping component distributed in the core and a shell surrounding the core, which can be prepared by first introducing the doping into the core of a metal oxide or metalloid oxide via an aerosol in a pyrogenic process, subsequently coating the doped core with a salt solution of a metal or metalloid, drying it and optionally calcining it; which particles can be employed for chemical-mechanical polishing.
申请公布号 US6855635(B2) 申请公布日期 2005.02.15
申请号 US20020101942 申请日期 2002.03.21
申请人 DEGUSSA AG 发明人 SCHUMACHER KAI;MANGOLD HELMUT
分类号 C01B13/14;C01B13/18;C01B13/24;C01B33/12;C09K3/14;H01L21/304;(IPC1-7):H01L21/302 主分类号 C01B13/14
代理机构 代理人
主权项
地址