| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical sensor capable of accurately determining the flashing time of an exposing flash lamp in a continuous proximity exposure apparatus using the flash lamp. <P>SOLUTION: The optical sensor 1 comprises a charge transfer type line sensor 10 having a plurality of light receiving elements 10a linearly aligned on a line in association with each other, which reads a photoelectric converted charge in the light receiving elements 10a for each line; and a photosensor 11 having at least one or more independent light receiving elements 10a on an axis parallel to the alignment direction of the light receiving elements 10a of the line sensor 10. The image fetching period of the line sensor 10 is different from that of the photosensor 11. <P>COPYRIGHT: (C)2009,JPO&INPIT |
