发明名称 METHOD AND APPARATUS FOR ALIGNING AN INTERFEROMETER MIRROR
摘要 A method and apparatus for aligning an interferometer mirror orthogonal to an incident collimated light beam is described. A retroreflector is placed in the collimated beam before the mirror so that a reference beam is obtained to which the light reflected by the interferometer mirror can be aligned on the view screen of the interferometer. Once adjustment has been achieved, the retroreflector can be removed.
申请公布号 US3844660(A) 申请公布日期 1974.10.29
申请号 US19720307162 申请日期 1972.11.16
申请人 ZYGO CORP,US 发明人 HUNTER G,US
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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