| 摘要 |
A high energy sensor, particularly adapted for use in analyzing a high power laser beam, which preferably utilizes the change in resistance of a thin-film element as a function of temperature to determine the energy of the beam per unit of area. The sensor itself comprises a top platinum resistor element separated from a botton platinum resistor element by a thermal resistor formed of insulating material. On top of the upper resistor is an electrical insulator, and above this insulator is a platinum reflector protected by a dielectric coating, the reflector being utilized to reflect the major portion of incident wave energy. The assembly is carried on a cooled beryllium oxide substrate or the like in contact with the bottom resistor. A plurality of such sensors can be arranged in an array, and each individual sensor interrogated in sequence to determine the energy distribution of the laser beam. Alternatively, instead of utilizing thin-film resistors on opposite sides of a thermal resistor, it is also possible to utilize two thermoelectric elements (e.g., thermocouples) with the same overall effect.
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