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发明名称
JIG FOR WAFER TRANSFER IN BULK
摘要
申请公布号
JPS5548924(A)
申请公布日期
1980.04.08
申请号
JP19780120358
申请日期
1978.10.02
申请人
HITACHI LTD
发明人
GOTOU TETSUYA;IKEDA MINORU
分类号
H01L21/677;B65D85/57;B65D85/86;H01L21/02;H01L21/67
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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