| 摘要 |
PURPOSE:To print a pattern without contact by employing two movable tables, placing a printed board to be printed with the pattern on one table and a photomask on the other table, and projecting a light from the photomask via a reflecting mirror on the board while observing the laser light. CONSTITUTION:A table 2 movable in Y direction is placed on a table 1 movable in X direction, two tables 3 movable in X, Y and theta directions are also provided thereon, a photomask 4 is placed on one of the tables 3 and a printed board 5 to be printed with a pattern is placed on the other of the tables 3. One rotatable polygonal mirror 9 is arranged through F and theta lenses 10 and 11 thereon to project the light from a laser oscillator 6 corresponding to the lens 10 and the light from a laser oscillator 7 through a light modulator 8 corresponding to the lens 11 thereto. Thereafter, the light is observed via an eyepiece 19 provided between the tables and the mirror 9 to project the reflected light from the mask 4 on the board 5. |
