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发明名称
摘要
申请公布号
JPS5918430(U)
申请公布日期
1984.02.04
申请号
JP19820112437U
申请日期
1982.07.23
申请人
发明人
分类号
H01L23/52;H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L23/52
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