CHEMICAL CIRCULATION AND FILTRATION SYSTEM,申请号JP19860172384-传众专利搜索

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发明名称	CHEMICAL CIRCULATION AND FILTRATION SYSTEM
摘要
申请公布号	JPS6328038(A)	申请公布日期	1988.02.05
申请号	JP19860172384	申请日期	1986.07.22
申请人	NEC CORP	发明人	ISHITANI SHIGERU
分类号	H01L21/302;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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