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发明名称
HEAT TREATMENT METHOD
摘要
申请公布号
JPS6351625(A)
申请公布日期
1988.03.04
申请号
JP19860196012
申请日期
1986.08.21
申请人
SONY CORP
发明人
YAMANAKA HIDEO;SAKAGUCHI JUNJI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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