| 摘要 |
PURPOSE:To shorten a measurement time and to obtain an accurate measured value by moving an indenter to a reference position set nearby a sample after a contactor contacts the sample, and moving the indenter closer to the sample at a low speed and pressing it into the sample. CONSTITUTION:The sample 40 is placed under a microscope 43, the indenter 1 is pressed against the sample 40, and a DC current is supplied to the driving coil 25 for a contactor lever 4. Then the lever 4 rotates around a cross spring 7 as a fulcrum to lower the contactor 3, thereby pressing the surface of the sample 40 with a pressing force of 0.05N (newton). Then the indenter 1 is driven by an indenter lever 2 while the spring force of the cross spring 6 is compensated through a displacement gauge 20. The driving signal 30 of the indenter lever 2 is amplified by a driving amplifier 3 to a current value 32 and then drives a driving coil 22, but the difference between the current value 32 and a current value 33 corresponding to the spring force of the cross spring 6 detected by the displacement gauge 20 is calculated by a comparator 34 to extract the load of the indenter 1 on the sample 40 as a signal 35.
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