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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH03162591(A)
申请公布日期
1991.07.12
申请号
JP19890301239
申请日期
1989.11.20
申请人
FUJI ELECTRIC CO LTD
发明人
OIWA KIYOSHI
分类号
C23F4/00;H01L21/205;H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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