METHOD AND DEVICE FOR NARROW-BAND LASER OSCILLATION AND LASER ALIGNER EMPLOYING THEM

摘要

PURPOSE:To output a narrow-band laser light for enhancing the depth of focus in laser exposure. CONSTITUTION:An etalon 25 is disposed in a laser resonator and the incident angle of laser light impinging on the etalon 25 is varies intermittently or continuously. In this regard, arranging position of the etalon 25 is adjusted stepwise by means of a step motor 27 with respect to the optical axis of laser resonator.