Plasma generator generating plasma by application of microwaves

摘要

The plasma generator has an ionisation chamber (2) into which a gas is introduced. An antenna (3) placed inside the chamber is connected to a coaxial cable (6) carrying microwave energy through a single coaxial connector (5). Permanent magnets (4) are fixed to the outer wall of the ionisation chamber over the length of the antenna. The length of the antenna is an odd multiple of the quarter wavelength in vacuum of the microwaves brought by the coaxial cable. The antenna can be cylindrical or a helical coil. The diameter of the antenna is around 2.3 times smaller than the diameter of the ionisation chamber. The beam of ions is emitted through a grille at the end of the ionisation chamber.