| 摘要 |
Optical metrology method and apparatus for simultaneously measuring changes in figure of a primary mirror and spacing between the primary mirror (58) and a secondary mirror (54). One or more optical heads (62A, 62B, 62C) are attached to structure (66) supporting the secondary mirror (54) and adjacent thereto. Each optical head (62A, 62B, 62C) provides a laser generated output beam. By interferometry and electronics, output signals are generated which indicate the changes in figure of the primary mirror (58) and the spacing between the primary mirror (58) and the secondary mirror (54).
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