| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a hazardous material liquid dispensing system and method, capable of continuously running a process tool even during the replacing of a supply container, and eliminating the necessity of ventilating. SOLUTION: An unventilated hazardous material liquid dispensing system 25 includes a detachable supply container 7 connected to a gas source 1, and a permanent buffer container 11. The permanent buffer container 11 is further connected to the detachable supply container 7 through a suction pump 14. The suction pump 14 sucks pressure from the permanent buffer container 11, and transfers the pressure to the detachable supply container 7. By the transfer of the pressure, hazardous material liquid 34 is drawn from the detachable supply container 7 into the permanent buffer container 11. The permanent buffer container 11 dispenses the hazardous material liquid 34 to a process tool.</p> |
