| 摘要 |
PURPOSE: To provide an ultraviolet ray source capable of taking out ultraviolet ray from an excimer molecule in an optimum condition. CONSTITUTION: A mixed gas containing chlorine gas and krypton gas or xenon gas is sealed in a bulb 1, and sealing condition of the mixed gas for operating in an optimum condition is decided by using the partial pressure of the chlorine gas as a parameter. A magnetron 5 is operated, a microwave power is collected in the bulb 1 to excite the mixed gas sealed and to produce an excimer molecule, and ultraviolet ray is generated by energy transition of the excited mixed gas to a ground state. The ultraviolet ray generated is reflected by a microwave cavity wall 3 and collected in the direction of a mesh 7. |
