| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method for monitoring organic solvent performance and for removing organic materials in microelectronics manufacture by terminating dipping of a substrate, when a dielectric constant of the organic solvent in which the substrate is dipped reaches a predetermined value. SOLUTION: A tank 11 contains solvent 13. Wafer cassettes 15 to 17 are dipped into the tank 11. A dielectric sensor 19 is connected to a dielectric- constant analyzer electronics 21. The analyzer electronics 21 is connected to a computer 23. For example, the computer 23 is programmed with an upper limit of dielectric constant taken into account. If the dielectric constant of the solvent 13 exceeds the programmed upper limit, alarm operates. The cassettes 15 to 17 are not removed from the solvent 13 nor dipping of new cassette is suspended, until the solvent reservoir is charged slightly or modified to reduce the dielectric constant. |
