PRESERVING VESSEL AND PRESERVING METHOD FOR DIELECTRIC TARGET

摘要

PURPOSE: To provide a preserving vessel and preserving method capable of preserving a target of a dielectric substance of a titanate system and zirconate system with which DC sputtering is made possible by applying an oxygen defect thereto and confining the specific resistance to <=10Ω.m and which is made possible over a long period without deteriorating the target. CONSTITUTION: This preserving vessel consists of a vessel body 1 formed by holding an O-ring 18 between a bottom plate 2 of aluminum and an eye flange 3 and an upper cap 4 of a transparent acrylic resin tightened thereto via an O-ring 19. The dielectric target 5 is housed together with a backing plate 6 into the preserving vessel 10 for the dielectric target in which vacuum of <=10Torr is maintained, by which the target is held under vacuum of <=10Torr or is maintained in the atmosphere gaseous argon.