发明名称 CHUCKING DEVICE
摘要 PURPOSE: To provide a chucking device which grasps simulaneously a plurality of covers accommodated in a recess and transports to another recess precisely. CONSTITUTION: Chucking pawls 16, 17 to grasp covers 4, 6 are slidably installed on a pair of chuck members 14, 15 which can move in the opposing directions, and energizing means to energize the pawls 16, 17 in the cover grasping direction are installed also on the chuck members 14, 15. The pawls 16, 17 are contacted with the mating side face of the covers 4, 6 by moving the chuck members 14, 15 in the cover grasping direction, and the covers 4, 6 are grasped by moving the chuck members 14, 15 further in the cover grasping direction against the energizing forces of the energizing means.
申请公布号 JPH08294892(A) 申请公布日期 1996.11.12
申请号 JP19950102354 申请日期 1995.04.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMADA HIROMICHI;SHINMEN HIROYUKI;JO TOSHITAKA
分类号 B25J15/08;H01L21/50;H01L21/677;H01L21/68;H01L29/84;(IPC1-7):B25J15/08 主分类号 B25J15/08
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