| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor which can reduce running costs of the processor without causing irregular processing on a surface of a substrate when it is desired to remove a processing solution on the substrate surface, and which can prevent damages on the substrate caused by solidification of the processing solution even when the processing is interrupted for a certain time. SOLUTION: Disposed in a developing-solution removing section are a developing-solution removing member 50 for removing a developing solution attached on a surface of a substrate 1 and a supply pipe 32 for supplying the developing solution to the developing-solution removing member 50. The developing-solution removing member 50 has a first roller fixed to a rotary shaft 52 which is loosely rotated and supported to be moved vertically and also has a pair of guide rollers 54 attached to both ends of the first roller. The developing solution applied onto the substrate 1 is removed by the roller as the substrate 1 moves. Even when the processing of the substrate 1 is interrupted, the developing solution supplied from the supply pipe 32 enables prevention of solidification of the developing solution on the roller. |
