APPARATUS FOR PRODUCING SEMICONDUCTOR SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To surely and safely pull a single crystal having a large diameter and a heavy weight in a decompressed chamber. SOLUTION: This apparatus for producing a semiconductor single crystal comprises a seed crystal lifting and lowering mechanism for holding the single crystal, lifting and lowering the seed crystal in the vertical directions and a single crystal holding mechanism for holding a constriction of the formed single crystal and is equipped with a housing container 10a for housing at least a driving part 14 for the seed crystal lifting and lowering mechanism and at least a driving part 15 for the single crystal holding mechanism and a housing container lifting and lowering mechanism 3 for lifting and lowering the housing container 10a in the vertical directions. Furthermore, the housing container 10a can be formed into a heat-resistant structure or a cooling means for cooling the interior of the housing container 10a can be provided. The apparatus can be composed so as to carry out the winding of a power source cable for driving the seed crystal lifting and lowering mechanism or the single crystal holding mechanism or a cable 7 for control signals in synchronism with operations of a mechanism for winding the wire 3 for hanging down the housing container 10a.