JET NOZZLE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To facilitate manufacture of a tube having high structure being employed in a semiconductor application without causing such defect as increase of surface roughness or pin hole. SOLUTION: A nozzle is arranged on a substrate 10 on which at least one dielectric material layer 14 and a metal layer or a metal stripe are formed. The metal layer is then removed at least partially while leaving a fluid transfer channel in the dielectric material layer 14 or the vicinity thereof. In order to thrust a fluid, at least one heating element is applied to the channel and the fluid is heated to form a bubble. The bubble passes through the nozzle to jet the peripheral fluid at least partially.