发明名称 WORK IMMERSING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To safely and surely contain a work immersed in a work containing member, by providing an annular work holder holding a work in a position apart from a bottom of a tray by supporting an outer circumferential part of a work to an inside of a plurality of work containing parts formed and divided by a partition inside a tray. SOLUTION: A work W supplied to a work containing part 12 is lowered inside immersion liquid 16 and mounted on a work supporting part 15b in an annular work holder 15, and is supported in a position apart from a bottom 11b of a tray 11 while an outer circumferential part thereof is supported by the work holder 15. Since the work W does not lower inside the immersion liquid 16 much and collide with the bottom 11b of the tray 11, it is not scratched by a foreign matter, etc., attaching to a surface or precipitating on the bottom 11b of the tray 11, and can be contained inside the work containing part 12 safely and surely. Furthermore, since the work holder 15 is formed of a soft material, there is no possibility that the work W is scratched by the work holder 15.</p>
申请公布号 JPH11111833(A) 申请公布日期 1999.04.23
申请号 JP19970285990 申请日期 1997.10.02
申请人 SPEEDFAM CO LTD 发明人 YASHIKI HIROSHI;MARUYA MITSURU
分类号 H01L21/673;H01L21/304;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/673
代理机构 代理人
主权项
地址