| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor microvavle capable of controlling a large amount of fluid at a low power consumption. SOLUTION: A valve port 10a is penetratedly provided on the first silicon substrate 10, and a second silicon substrate 20 is provided with a first flexible portion 22 and a valve element 23 leaving/contacting from to a valve seat 13 corresponding to the flexibility of the first flexible potion 22. A second flexible portion 12 is formed on the first silicon substrate 10. The bimetal element films 24, 14 comprising a metal thin film are laminated on an opposite side of the opposed surface each other on the first and second flexible parts 22, 12. Bimetal element films 24, 14 constitute a bimetal with the first flexible portion 22 and the second flexible portion 12.
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