| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for vessel-carrying in and out and a method enabling carrying in/out of vessels, housing and taking out substrates in/from the vessels successively. SOLUTION: An apparatus 2 for carrying in and out is provided with a before-cleaning side out-port 12, a before-cleaning side in-port 13, an after- cleaning side in-port 15, an after-cleaning side out-port 16, a loader/unloader part 20, a carriage arm 10 for carrying carriers C between stock parts 14, 17, 31, 32, 33 and 34. The carriage arm 10 carries the carriers C from the in-port 13 to the loader/unloader part 20 and from the loader/unloader part 20 to the out-port 12 via the stock parts 14, 31 and 32, and carries the carries C from the in-port 15 to the loader/unloader part 20 and from the loader/unloader part 20 to the out-port 16 via the stock parts 17, 33 and 34. |
