APPARATUS FOR DISPLAYING WAFER IMAGE IN SEMICONDUCTOR STEPPER

摘要

PURPOSE: An apparatus for displaying a wafer image in a semiconductor stepper is provided to ease an arrangement of a wafer and to allow an effective maintenance of the stepper. CONSTITUTION: In the display apparatus, the first microscope(10) for detecting the wafer is connected to the first charge coupled device(CCD)(30), and the second microscope(16) for detecting a reticle is connected to the second CCD(32). Both the CCDs providing an excellent image are connected to a controller(34). The controller(34) is further connected to an interface(24) for receiving a signal from a panel(22) and sending the signal to the controller(34). The panel(22) is used for selecting input/output by a human operator. The controller(34) is yet further connected to a monitor(20).