| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric sensor in which a damping operation is hard to generate with reference to the prescribed vibration of a piezoelectric vibrating body, in which a stable characteristic can be derived and whose connection to an external circuit is easy. SOLUTION: In the piezoelectric sensor in accordance with this invention, vibration driving electrodes 11 are arranged on the outer circumferential side on the surface of a disklike piezoelectric ceramic substrate 10, vibration detecting electrodes 15 to 18 are arranged respectively on the inner circumferential side, a plumb hob member 3 is pasted in the central part on the rear surface of the piezoelectric ceramic substrate 10, and an angular velocity is detected by using two different vibration modes. A nonpolarizing region is installed between the vibration detecting electrodes 11 and the vibration detecting electrodes 15 to 18. Support members 2 which sandwich and fix the piezoelectric ceramic substrate 10 from both main face sides and which comprise a spring property are bonded. |
