| 摘要 |
PROBLEM TO BE SOLVED: To provide an IPA(isopropyl alcohol) type wafer drier having a recovery device for recovering high purity IPA from water-containing IPA. SOLUTION: This IPA type wafer drier 40 is provided with an IPA recovery device 42 in addition to the constituent devices of an conventional IPA type drier. This IPA recovery device 42 is provided with: a vaporizer 44 for vaporizing water-containing IPA; a vapor permeation module 46 which has permeation membrane and is used for separating IPA vapor and water vapor from each other; an IPA condenser 48 which is connected to the IPA side of the vapor permeation module 46 and used for condensing the separated IPA vapor; and a water condenser 50 which is connected to the water vapor side of the vapor permeation module 46 and used for condensing the separated water vapor. The recovery process using the IPA recovery device 42 comprises: feeding water-containing IPA to the vaporizer 44 and vaporizing the water-containing IPA to form a vapor mixture of IPA vapor and water vapor; allowing the vapor mixture to flow into the vapor permeation module 46; allowing the water vapor to permeate through the permeation membrane to the water vapor side evacuated to a reduced pressure by a vacuum pump 56; allowing the IPA vapor to flow out from the module 46 without permeating through the membrane and to flow into the IPA condenser 48, to cool and condense the IPA vapor into an IPA liquid and to reuse the IPA liquid; and also, cooling and condensing the water vapor into water by the water condenser 50 and accumulating the condensed water in a water tank 54.
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