发明名称 CROSS-TYPE ULTRASONIC FLEXURAL OSCILLATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic oscillation apparatus which has an oscillator rich in rigidity and is used for an ultrasonic processing machine exhibiting a high accuracy in tip positioning. SOLUTION: This apparatus has such a structure that at positions apart by the same distance from the center of the axial direction of the first bar 11 of a cross-type oscillator 10 jointly oscillating in a flexural oscillation mode by the first and second bars 11, 12 crossing each other at right angles, at least a set of ultrasonic oscillators 13, 14 oscillating in the oscillation directions with phases reverse to each other is combined vertically to the axis of the first bar 11; and that the resonance frequency of the oscillation mode of the ultrasonic oscillators 13, 14 and that of the flexural oscillation mode of the cross-type oscillator 10 are equal.
申请公布号 JP2002177886(A) 申请公布日期 2002.06.25
申请号 JP20000382786 申请日期 2000.12.15
申请人 FUJI KOGYO KK 发明人 TANIZAWA KIMIHIKO;MIYOSHI SOTA
分类号 B06B1/06;H01L41/09;(IPC1-7):B06B1/06 主分类号 B06B1/06
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