| 摘要 |
PURPOSE: To provide a communication monitoring system capable of detecting failures between a host computer and a semiconductor manufacturing device even when the host computer is down. CONSTITUTION: In the communication monitoring system 30 having the semiconductor manufacturing device 12, the host computer 11 connected with the semiconductor manufacturing device via a network 13 and a monitoring server 20 connected with the network, the semiconductor manufacturing device and the host computer execute communication via the network regarding a processing by the semiconductor manufacturing device, the monitoring server fetches data of first communication between the semiconductor manufacturing device and the host computer via the network when the first communication is executed, after that, fetches data of second communication between the semiconductor manufacturing device and the host computer via the network when the second communication is executed and judges whether or not the second communication is normal based on the data of the first communication.
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