| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus which has a measuring gauge that highly accurately measures the height-direction position of the upper face of a work and also measures the depth-direction position of a groove, always assures stable cut depth from the upper face of the work, and has a function capable of evaluating a machining state including the depth direction. SOLUTION: This dicing apparatus comprises a laser displacement gauge 81 that measures the upper-face height position of a work W, and a cut-depth control means 83 that controls the cut depth of a rotary blade 21 based on the upper-face height position of the work measured by the laser displacement gauge 81. A mapping means 82 is also provided that forms a map of the height of the upper face of the work based on the measured result of the height- direction positions of a plurality of points of the upper face of the work by the laser displacement gauge 81. Based on the map, the cut depth control means 83 more precisely controls the cut depth of the rotary blade 21. Furthermore, the shape of the groove machined on the upper face of the work and the size of the chipping generated at the groove can be evaluated by the laser displacement gauge 81. COPYRIGHT: (C)2003,JPO |
