| 发明名称 |
MEASURING APPARATUS FOR CHEMICAL LIQUID, CHEMICAL LIQUID- SUPPLYING METHOD, AND MEASURING METHOD FOR CONCENTRATION OF CHEMICAL LIQUID |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid-supplying apparatus for stably and inexpensively supplying a mixed chemical liquid having a specific concentration. SOLUTION: A measuring apparatus 11 for measuring the characteristics of a chemical liquid is provided in a channel for guiding the chemical liquid from the lower portion to the upper portion, and a nozzle 21 for jetting out the chemical liquid upward is provided at the lower portion of the measuring apparatus. COPYRIGHT: (C)2003,JPO |
| 申请公布号 |
JP2003185537(A) |
申请公布日期 |
2003.07.03 |
| 申请号 |
JP20010387611 |
申请日期 |
2001.12.20 |
| 申请人 |
FUJITSU LTD;FUJITSU VLSI LTD |
发明人 |
FUKUMIZU MASATAKA;OSHIDA YU;MATOBA TORU;NAKAMURA TSUYOSHI |
| 分类号 |
G01N29/02;G01N1/00;G01N27/06;G01N29/024;G01N29/30;G01N29/32;H01L21/02;H01L21/304;H01L21/306;(IPC1-7):G01N1/00 |
主分类号 |
G01N29/02 |
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