| 摘要 |
A machine-vision system and method are described for simultaneously imaging different sides of an object. The system includes an imager and optics that images two or more views of the first side of the object and of the second side. The views of the first side and the views of the second side of the object are each from different angles. A divider background surface is placed near a major surface of the object to obtain separate images of features of the object on the first side of the object and on the second side. In one embodiment, the divider diffuses light to back light the features on the object on the first side and back light the features on the second side of the object. In some embodiments, the information obtained is used to fix manufacturing problems in a semiconductor fabrication plant.
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