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发明名称
电容差値检测电路及微机电系统感测器
摘要
本发明系有关于个别地具有电容器之振荡器,此等电容器之电容系根据外力而改变,并根据此等电容产生第一振荡信号。举例言之,每一电容器系设置于基板与可移动地设置为面向基板之质量本体间并振荡于垂直于基板之方向。检测单元可将电容器之电容间之相对差值检测为第一振荡信号之频率差值。应用于基板之水平方向之角速度或加速度系根据藉由检测单元所检测之频率改变而计算。因此,其可形成可检测因外力所导致之二电容器之微小电容改变的电容差值检测电路及微机电系统(MEMS)感测器。
申请公布号
TW200537107
申请公布日期
2005.11.16
申请号
TW094109859
申请日期
2005.03.29
申请人
富士通股份有限公司
发明人
北野麻世;鹫见秀司;森边刚
分类号
G01R27/26
主分类号
G01R27/26
代理机构
代理人
恽轶群;陈文郎
主权项
地址
日本
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