METHOD OF MANUFACTURING MAGNETORESISTIVE ELEMENT AND SYSTEM FOR MANUFACTURING MAGNETORESISTIVE ELEMENT

摘要

Manufacturing a magnetoresistive element excellent in RA and MR ratio is enabled. A method of manufacturing a magnetoresistive element of an embodiment includes forming a first laminate constituting a lower electrode on a base substrate, forming a second laminate which is a magnetoresistive effect laminate on the first laminate, and forming an upper electrode on the second laminate. The step of forming a first laminate includes forming a metal layer on the base substrate, forming a conductive amorphous layer on the metal layer, and performing ion etching on the conductive amorphous layer.

主权项

1. A method of manufacturing a magnetoresistive element, comprising:
forming a first laminate on a base substrate, the first laminate configuring a lower electrode of the magnetoresistive element; forming a second laminate on the first laminate, the second laminate being a magnetoresistive effect laminate of the magnetoresistive element; and forming an upper electrode of the magnetoresistive element on the second laminate, wherein said forming a first laminate includes:
forming a metal layer on the base substrate;forming a conductive amorphous layer on the metal layer; andperforming ion etching on the conductive amorphous layer.