发明名称 |
MASSASTROMING-REGELAAR. |
摘要 |
<p>A mass flow controller is disclosed herein having a bridge with a pair of arms positioned in good heat transfer relation with a gas stream, the flow rate of which is to be controlled and energized by a constant current generator wherein a resistance difference due to differential cooling by the gas stream is sensed by a bridge amplifier. A linearization network receives a signal from the bridge amplifier and applies one or more correction factors to the bridge amplifier signal to yield a linearized signal having a substantially linear relation to the rate of flow of the gas stream. A comparator receives the linearized signal and a user selectable set point signal and produces a comparator output signal which is sensed by a servoamplifier. The servoamplifier controls a valve which meters the rate of flow of the gas stream.</p> |
申请公布号 |
NL8104478(A) |
申请公布日期 |
1982.05.03 |
申请号 |
NL19810004478 |
申请日期 |
1981.10.01 |
申请人 |
THERMCO PRODUCTS CORPORATION TE ORANGE, CALIFORNIE, VER. ST. V. AM. |
发明人 |
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分类号 |
G05D7/06;(IPC1-7):05D7/06 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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