发明名称 Monitoring Apparatus, Lithographic Apparatus and Method of Monitoring a Change in a Property
摘要 Disclosed is a monitoring apparatus configured to monitor a change in a property. The monitoring apparatus comprises a fiber-Bragg grating sensor, an amplifier, an integrator and a processor. The fiber-Bragg grating sensor is operable to sense a band of wavelengths of incident radiation and to output a corresponding sensor output signal. The band of radiation is centered upon a first value representing a Bragg wavelength. The amplifier is arranged to separate the sensor output signal in a first part and a second part, to create an inverted first part by inverting the first part, and to create an amplified signal based on the inverted first part and the second part. The integrator is operable to integrate the amplified signal to obtain an integrated signal. The processor operable to derive a second value representative of a shift of the Bragg wavelength based on the integrated signal.
申请公布号 NL2016733(A) 申请公布日期 2016.12.12
申请号 NL20162016733 申请日期 2016.05.04
申请人 ASML NETHERLANDS B.V. 发明人 JOHANNES ADRIANUS PETRUS LEIJTENS;JOHANNES ANTONIUS GERARDUS AKKERMANS;GEORGE ALOIS LEONIE LEENKNEGT;MICHAEL BENJAMIN HAVERDINGS;PIETER LUCAS KAT
分类号 G03F7/20 主分类号 G03F7/20
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