发明名称 Articulated arm transfer device
摘要 In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction.
申请公布号 US4666366(A) 申请公布日期 1987.05.19
申请号 US19850755905 申请日期 1985.07.17
申请人 CANON KABUSHIKI KAISHA 发明人 DAVIS, JAMES C.
分类号 H01L21/677;(IPC1-7):B65G65/00 主分类号 H01L21/677
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