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经营范围
发明名称
CONTAINMENT DEVICE
摘要
申请公布号
JPS6381939(A)
申请公布日期
1988.04.12
申请号
JP19860225949
申请日期
1986.09.26
申请人
HITACHI LTD
发明人
EBARA MASARU
分类号
H01L21/66;B65G1/00;B65G1/133;G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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