| 摘要 |
PURPOSE:To achieve accurate measurement of a line width with a stable and high reproducibility, by measuring the line width of a linear construction to be inspected in a better condition after the correction of focusing and angular deviations based on the results of detection. CONSTITUTION:Based on a detection signal from a focusing deviation detector 26, detection is performed to determine to which side and how much a linear construction 4 to be inspected of an object 2 to be measured deviates in the direction of optical axis from a specified position in an optical system and a driving means 8 is driven according to the focusing deviation thus obtained to accomplish a focus adjustment. Then, based on a detection signal from an angle deviation detector 28, the directivity of the linear construction 4 being inspected of the object 2 being measured is detected to turn a slit 20 according to the angular deviation thus obtained. After such a correction, the line width of the linear construction 4 being inspected is measured with a photodetector 24 or the like.
|
