| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film excellent in wear resistance.SOLUTION: The hard film is provided that is formed on a substrate surface and is composed of: at least one kind of element X selected from the group consisting of a group IV element, a group V element, and a group VI element of an atomic number larger than Cr; and a nitride or a carbonitride containing Al and Cr. The X concentration maximum points where the concentration of the element X is highest are present repeatedly in the vertical direction to the substrate surface and one or more of the X concentration minimum points where the concentration of the element X is lowest are present between vertically adjacent X concentration maximum points. The composition of the hard film changes continuously in the vertical direction.SELECTED DRAWING: Figure 1 |
