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发明名称
MICROWAVE ION SOURCE
摘要
申请公布号
JPH0246627(A)
申请公布日期
1990.02.16
申请号
JP19880196587
申请日期
1988.08.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MUKAI YUJI;TSUDA YOSHIYUKI;KODERA KOICHI;YASUI HIDEAKI;NISHIKAWA IKUKO
分类号
H01J27/16;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
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