MONOLITHISCHER BESCHLEUNIGUNGSMESSER MIT BIEGSAM MONTIERTEM KRAFTWANDLER.

摘要

An accelerometer comprising a monolithic crystalline substrate, the substrate comprising a support, a proof mass, and a force transducer. The proof mass is connected to the support by one or more proof mass flexures that permit the proof mass to rotate with respect to the support about a hinge axis. One end of the force transducer is connected to the support, and the other end is connected to the proof mass by a transducer flexure. The transducer flexure has a thickness substantially less than the thickness of the transducer, such that when the proof mass rotates, the transducer rotates with respect to the proof mass about a transducer axis that passes through the transducer flexure. Preferably, the transducer axis is offset from the hinge axis in a manner so as to cancel nonlinearities in the force transducer, and the length of the proof mass along the pendulous axis is less than half the length of the transducer. Damping plates are positioned above and below the proof mass, and provide shock stops and damping.