发明名称 半導体実装装置およびベアチップ搬送ユニット
摘要 PROBLEM TO BE SOLVED: To provide a bare chip transfer unit and a semiconductor mounting device, which pick a bare chip on a lateral face and which have high yield and high versatility.SOLUTION: A semiconductor mounting device comprises: a chucking part (chuck pins 11) which contacts a lateral face of a bare chip 3 for mechanically chucking the bare chip 3; and a rotary member which rotates simultaneously with the chucking part (chuck pins 11). The semiconductor mounting device further comprises a bare chip chucking unit (collet 1) in which rotation of the rotation member is inhibited by contact of the chucking part (chuck pins 11) with the lateral face of the bare chip 3, and the bare chip 3 is held by a force of the rotation member trying to rotate.
申请公布号 JP6052862(B2) 申请公布日期 2016.12.27
申请号 JP20120212932 申请日期 2012.09.26
申请人 NECエンジニアリング株式会社 发明人 立原 裕作
分类号 H01L21/52;H01L21/677 主分类号 H01L21/52
代理机构 代理人
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