发明名称 METHOD OF FORMING TRANSISTORS IN A PERIPHERAL CIRCUIT
摘要 A method of forming a transistor in a peripheral circuit of a random access memory device (DRAM) or a static random access memory device (SRAM) wherein a transistor gate, capacitor electrode or other component in the memory cell array is formed simultaneously with the formation of a transistor gate in the periphery.
申请公布号 WO9622612(A1) 申请公布日期 1996.07.25
申请号 WO1996US00615 申请日期 1996.01.19
申请人 MICRON TECHNOLOGY, INC. 发明人 ROBERTS, MARTIN, CEREDIG
分类号 H01L27/11;H01L21/8242;H01L21/8244;H01L27/10;H01L27/105;H01L27/108;(IPC1-7):H01L21/824;H01L21/824 主分类号 H01L27/11
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