Verfahren zur Herstellung einer Röntgenstrahlmasken-Struktur

摘要

A method of making an X-ray mask structure having an X-ray absorber in a desired pattern on the surface of a support film held by a frame comprises the step of patterning the X-ray absorber, including a drawing step that utlizes charged particles, and the step of thereafter providing the frame with a magnetic member. The frame and the support film are each comprised of a non-magnetic material.