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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH08316441(A)
申请公布日期
1996.11.29
申请号
JP19950115029
申请日期
1995.05.15
申请人
HITACHI LTD
发明人
KONDO TAIICHI
分类号
H01L21/304;H01L21/02;H01L27/12;(IPC1-7):H01L27/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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