Sensor structure with L-shaped spring legs

摘要

A sensor structure (10) has a central mass (16) mounted within a support structure comprising an outer support frame (18), and upper and lower plates or covers (12, 14). Eight L-shaped ribbon springs (32, 34) fit about the corners (28) of the mass (16) to mount mass (16) for movement from a reference position with respect to the support structure. One leg (38) of each spring (32, 34) is connected to an associated side (26A) of the mass (16) centrally of the length of the associated side (26A). The other leg (40) is connected to the outer support frame (18). The sensor structure is designed for use as a sensing mechanism in an electrostatic accelerometer arrangement.