OSCILLATION GYRO SENSOR, COMPOSITE SENSOR AND PROCESS OF PRODUCING GYRO SENSOR

摘要

A detection unit equipped with a piezoelectric/electrostriction device (12) for detecting displacement perpendicular to the oscillation direction of an oscillator (2) when the oscillator rotates is constructed of a sintered body of ceramic together with the oscillator (2) and a support (4). The detection unit is constituted by a first sheet-like portion (6) which is thinner than the oscillator (2) and whose major surface extends in the oscillation direction. The piezoelectric/electrostriction device (12) is integrally formed on the first sheet-like portion (6) by a film formation method. Further, a thin second sheet-like portion (8) for lowering the rigidity of the oscillation element (2) in the oscillation direction and allowing the oscillation element (2) to easily oscillate is integrally disposed so that the major surface thereof extends perpendicularly to the oscillation direction. A ceramic oscillation gyro sensor the characteristics of which are hardly affected by the surrounding magnetic field, the manufacture of which is easy, and which has a high sensitivity is provided.