VACUUM CHAMBER CONTAMINATION PREVENTIVE APPARATUS FOR VACUUM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vacuum chamber contamination preventive apparatus for a vacuum apparatus which prevents a vacuum chamber from being contaminated by the particulate material existing in bellows the internal space of which communicates with the vacuum chamber or in a housing having no aperture at the other end or having a blind alley-like shape. SOLUTION: This vacuum chamber contamination preventive apparatus for the vacuum apparatus is constituted by connecting the bellows 14 (or the housing having no aperture at the other end or having the blind alley-like shape) the internal space of which communicates with the reaction chamber (vacuum chamber) 11 to this chamber, arranging a supporting member 15 extending into the reaction chamber (vacuum chamber) 11 and prevents the inside of the reaction chamber (vacuum chamber)11 from being contaminated by the particulate material existing in the internal space of the bellows (or the housing) 14. The boundary part between the bellows (or the housing) 14 and the reaction chamber (vacuum chamber) 11 is provided with a discharge port 20 or gas introducing port. Gas is discharged through a discharge port 20 or clean gas is supplied through a gas introducing port 20.